Method of depositing shadow sculpted thin films
AssigneesThe Governors of the University of Alberta, Alberta Microelectronic Corporation
InventorsKevin John Robbie, Michael Julian Brett
Life of this patent
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Abstract
A method of making vapor deposited thin films by rotating a substrate in the presence of an obliquely incident vapor flux. The substrate may be rotated about an axis normal to the surface of the substrate and/or parallel to the surface of the substrate by two motors mounted with their axes orthogonal to each other. Angle of incidence, measured from the normal to the surface of the substrate, exceeds 80.degree.. Feedback from a deposition rate monitor allows control of rotation speed of both motors to produce a growth with a defined pattern.
Claims17
A method of sculpting vapor deposited thin films, the method comprising the steps of:
- initially exposing a surface of a substrate to a vapor flux of material at an oblique incident angle to grow a columnar thin film formed of columns of the material;
- and
- subsequently, and while continuing to expose the surface to the vapor flux, rotating the substrate about an axis parallel to the plane of the substrate.
A method of sculpting vapor deposited thin films, the method comprising the steps of
- establishing, in a computer, a desired pattern of thin film growth;
- while exposing a surface of a substrate to a vapor flux at an oblique incident angle, rotating the substrate about a normal to the surface;
- providing control signals to the computer indicative of thin film growth on the substrate;
- and
- automatically controlling the rotation speed of the substrate in response to the control signals to form distinct helical columns of material on the substrate.
A method of sculpting vapor deposited thin films, the method comprising the steps of:
- exposing a surface of a substrate to a vapor flux at an oblique incident angle;
- and, at the same time,
- rotating the substrate about a normal to the surface while maintaining the oblique angle at greater than 80.degree. to a normal to the surface of the substrate, so as to form distinct helical columns of material on the substrate.
A method of growing thin film microstructures on a substrate exposed to a vapor flux at an oblique angle of incidence, the method comprising the steps of:
- forming mounds on the substrate, the mounds being separated by sufficient distance that vapor is not deposited between the mounds;
- and
- exposing the surface of the substrate to a vapor flux at an oblique incident angle to grow a columnar thin film on the mounds, with one column on each mound.
Dependencies are inferred from the claim text.