Optical proximity correction method and system
AssigneeInternational Business Machines Corporation
InventorsDonald James Samuels, Matthew R. Wordeman
Life of this patent
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Abstract
An optical proximity correction method and system are disclosed that allows for the correction of line width deviations caused by nonlinear lithography tools by calculating required chrome on glass line widths for a desired printed line. Line width correction is determined based only on the pitch of the line, defined as the width of the line and the distance to an adjacent line. Correction information is calculated from an aerial simulation and is then organized by pitch to provide a more efficient means of line correction.
Claims22
A method of correcting line element deviations during nonlinear operation of an optical lithography system by width adjusting a light blocking material on an optical mask, said method comprising the steps of:
- choosing a control grating for a predetermined circuit pattern and exposure system, said control grating represented by a control line and a control clear space width;
- generating expected line deviation information from an aerial simulation for a plurality of line/space gratings wherein said plurality of line/space gratings ranges from said control grating to a region where said optical lithography system operates linearly;
- generating line correction information from said expected line deviation information wherein said line correction information is grouped into subsets of information, each having a fixed pitch;
- for at least one line to be placed on said optical mask, determining a line width and distance to an adjacent line;
- for said at least one line to be placed on said optical mask, using said line correction information to determine a modified line width to correct for line element deviation;
- and
- for said at least one line to be placed on said optical mask, adjusting the width of each of said at least one line as necessary.
The method of claim I wherein said line correction information is comprised of at least one look-up table that is categorized by pitch and provides a required light blocking material width for a desired line width.
The method of claim I wherein said line correction information is comprised of at least one pitch specific polynomial equation that calculates a required light blocking material width for a desired line width.
A method of generating line width correction information within a computer aided design layout system to correct for printed line deviations caused by the nonlinear operation of an optical lithography system, said method comprising the steps of:
- selecting an environment, said environment to include at least one optical lithography system parameter and at least one circuit pattern parameter;
- simulating said environment to generate a plurality of predicted line deviation values as a function of corresponding line/space proportions;
- and
- transforming said plurality of predicted line deviation values into line width correction information, wherein the line width correction information is categorized by pitch, the pitch including the width of a printed line and a distance to an adjacent printed line.
A computer aided design integrated circuit layout tool having an optical lithographic line deviation correction system, said system comprising:
- a simulation system that generates pitch-based line width correction information for a predetermined exposure system and control grating wherein a pitch includes line width and a distance to an adjacent line;
- and
- a calculation system that takes as input a desired line width and a desired distance to an adjacent line and utilizes said pitch-based line width correction information to calculate a required width of a light blocking material.
A method of correcting line element deviations in which line correction information is created for a particular optical lithography system, the method comprising the steps of:
- simulating operation of the particular optical lithography system to generate a plurality of predicted line deviation values;
- and
- converting the plurality of predicted line deviation values into line width correction information based on a combined element of line width and distance to an adjacent line, whereby accurate line correction information is obtained in a single iteration.
Dependencies are inferred from the claim text.