Semiconductor device
AssigneeCanon Kabushiki Kaisha
InventorTakahiko Okabe
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Abstract
In a semiconductor device having regions of a vertical pnp bipolar transistor, that is, a collector region composed of a p-type semiconductor region, a base region composed of an n-type semiconductor region and an emitter region composed of a p-type semiconductor region, a metal electrode is connected to the base region with polysilicon doped with impurities being provided therebetween. In another form of a semiconductor device, an n.sup.+ region is provided within a base region of a vertical pnp bipolar transistor while surrounding an emitter region of the transistor.
Claims10
A semiconductor device comprising a vertical pnp bipolar transistor, comprising a collector region of p-type semiconductor, a base region of an n-type semiconductor and an emitter region of p-type semiconductor and a metal electrode connected to said base region;
- wherein said metal electrode is provided on said base region through a polysilicon doped with an impurity, said polysilicon being provided to form a first part of said base region having an impurity concentration higher than that in at least a second part of said base region, and said polysilicon is arranged to extend over the second part of said base region sandwiching a first insulating layer corresponding to said base region therebetween;
- wherein a metal used in said metal electrode is arranged to extend over said polysilicon sandwiching a second insulating layer provided on said first insulating layer therebetween;
- and
- wherein a metal used in an emitter electrode is arranged to extend over said emitter region and said base region in a periphery of said emitter region sandwiching said first and said second insulating layers therebetween.
A semiconductor device comprising a vertical pnp bipolar transistor, comprising a collector region of p-type semiconductor, a base region of an n-type semiconductor and an emitter region of P-type semiconductor and a metal electrode connected to said base region;
- wherein said metal electrode is provided on said base region through a polysilicon doped with an impurity, said polysilicon being provided to form a first part of said base region having an impurity concentration higher than that in at least a second part of said base region, and said polysilicon is arranged to extend over the second part of said base region sandwiching a first insulating layer corresponding to said base region therebetween;
- wherein a metal used in said metal electrode is arranged to extend over said polysilicon sandwiching a second insulating layer provided on said first insulating layer therebetween;
- wherein a metal used in an emitter electrode is arranged to extend over said emitter region and said base region in a periphery of said emitter region sandwiching said first and said second insulating layers therebetween;
- and
- wherein at least a part of said metal used in said emitter electrode overlaps with said polysilicon sandwiching said second insulating layer therebetween.
A semiconductor device comprising:
- a vertical bipolar transistor comprising a collector region, a base region and an emitter region, wherein said base region has a higher impurity concentration region and a lower impurity concentration region, a first insulating layer is provided on said base region, said first insulating layer has an opening over said higher impurity concentration region, said higher impurity concentration region is connected to a polycrystalline material including an impurity of the same conductivity type as said higher impurity concentration region through the opening, said polycrystalline material extends over said first insulating layer thereby covering the lower impurity concentration region of the base region;
- a metal electrode electrically connected to said polycrystalline material, and having a section extending on said polycrystalline material sandwiching a second insulating layer provided on said first insulating layer therebetween;
- an emitter electrode electrically connected to said emitter region;
- and
- a collector electrode electrically connected to said collector region.
Dependencies are inferred from the claim text.