Scanning probe microscope
AssigneeOlympus Optical Co., Ltd.
InventorsAkitoshi Toda, Takeshi Konada
Life of this patent
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AssigneeOlympus Optical Co., Ltd.
InventorsAkitoshi Toda, Takeshi Konada
Estimating the term…
A slide glass with a sample rested thereon is placed on an interior total reflection prism with a matching oil between them. A laser beam is applied through a prism to the sample, and evanescent light is generated on the sample surface. Above the sample, a probe supported at a free end of a cantilever is located, and an objective is provided above the probe. The objective has an angular aperture exceeding a vertical angle of the probe, where the angular aperture indicates an angle from a focal point of the objective to a diameter of entrance pupil. A scattering light detection lens barrel is provided above the objective, and cooperates with the objective to constitute a scattering light detection optical system. The optical system detects scattering light generated when the probe is introduced to the evanescent light.
A scanning probe microscope for obtaining optical information relating to a surface of a sample, said scanning probe microscope comprising:
Dependencies are inferred from the claim text.