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AssigneeHitachi, Ltd.
InventorsNatsuki Yokoyama, Yoshifumi Kawamoto, Eiichi Murakami, Fumihiko Uchida, Kenichi Mizuishi, Yoshio Kawamura
Estimating the term…
Disclosed is a fabricating system including a plurality of processing apparatuses connected to each other by means of an inter-apparatus transporter, wherein one group of semiconductor wafers are processed in processing apparatuses and other group of wafers are transported to specified processing apparatuses for a time interval from (To+T) to a time To; and another group of wafers are processed and the remaining group of wafers are transported for a time interval from (To+T) to (To+2T). Since processing apparatuses can receive at least one of works from the inter-apparatus transporter for a time interval T min, the distribution of works from the transporter to processing apparatuses is completed for the time interval T min. The transporter is emptied for each time interval T min, and works are unloaded to the emptied transporter, which makes easy the scheduling, control and management of the transporting of a plurality of works in the fabricating system. Moreover, since the fabricating system including processing apparatuses is periodically controlled at a cycle time T min, the scheduling of a plurality of works can be made easy, to enhance the level of optimization, thus improving the productivity.
. A semiconductor device fabricating method, comprising:
A semiconductor device fabricating method, comprising the steps of:
A semiconductor device fabricating method, comprising the steps of:
A semiconductor device fabricating method, comprising the steps of:
Dependencies are inferred from the claim text.