Process for manufacturing substrate for ink jet recording head using anodic oxidation
AssigneeCanon Kabushiki Kaisha
InventorHiroto Takahashi
Life of this patent
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Abstract
An ink jet recording head comprises a discharging opening for liquid discharge and an electricity-heat convertor. The electricity-heat convertor comprises a heat-generating resistor and electrodes attached to the resistor. The heat-generating resistor and electrodes are formed from a single layer of electroconductive material which is anodically oxidized to change it into an insulating material except in the region where the resistor and electrodes are located. The resistor is formed by anodically oxidizing a portion of the layer which remained electroconductive after the first anodic oxidation to obtain a desired resistance value.
Claims11
A process for preparing a substrate for an ink jet recording head having on a support an electricity-heat converter for generating heat, said converter comprising a heat-generating resistor and electrodes attached to said resistor, said process comprising the steps of:
- forming a layer of electroconductive material on the support;
- defining in said layer of electroconductive material a first region and a remaining region, said remaining region including a relatively narrow portion between relatively wide portions;
- and
- anodically oxidizing said first region of the layer to change the electroconductive material in said first region into an insulating material, the anodically oxidizing being carried out such that said remaining region of the layer is not anodically oxidized, and wherein the heat-generating resistor is formed by the narrow portion and the electrodes are formed by the wide portions.
A process for preparing a substrate for an ink jet recording head having on a support an electricity-heat convertor for generating heat, said converter comprising a heat-generating resistor and electrodes attached to said resistor, said process comprising the steps of:
- forming a layer of electroconductive material on the support;
- defining in said layer of electroconductive material a first region and a remaining region, said remaining region including a heat-generating resistor portion between electrode portions;
- anodically oxidizing in a first anodic oxidation said first region of said layer to change the electroconductive material in said first region into an insulating material, the first anodic oxidation being carried out such that said remaining region of the layer is not anodically oxidized;
- and
- forming a heat-generating resistor having a desired resistance value by selectively anodically oxidizing in a second anodic oxidation said heat-generating resistor portion of said remaining region of said layer of electroconductive material, the second anodic oxidation being carried out such that the electrode portions between which the heat-generating resistor is formed are not anodically oxidized.
A process for preparing an ink jet recording head comprising the steps of:
- forming on a support an electrically conductive film capable of being anodically oxidized which, upon being anodically oxidized, becomes capable of producing heat in response to electrical current flowing therethrough;
- defining in said electrically conductive film a first region and a remaining region, said remaining region including a heat-generating resistor portion between electrode portions;
- anodically oxidizing in a first anodic oxidation said first region of said electrically conductive film to change said first region of said film into an insulating material, the first anodic oxidation being carried out such that said remaining region of the film is not anodically oxidized;
- laminating a photosensitive composition on the film;
- partially removing the photosensitive composition to form a plurality of wall members constituting a liquid path, said liquid path being positioned to expose said heat-generating resistor portion of said remaining region of said film;
- bonding a top plate onto the wall members to form an enclosed liquid path;
- and
- anodically oxidizing in a second anodic oxidation said heat-generating resistor portion to form a heat-generating resistor, the second anodic oxidation being carried out such that the electrode portions between which the heat-generating resistor is formed are not anodically oxidized.
Dependencies are inferred from the claim text.