Radiant heating apparatus and method
AssigneeShin-Etsu Handotai Co., Ltd.
InventorMasanori Mayuzumi
Life of this patent
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Abstract
In a radiant heating apparatus, at least an outer radiant heating unit and an inner radiant heating unit located inside the outer radiant heating unit are disposed. A peripheral portion of an article to be treated is mainly heated by the outer radiant heating unit, while a central portion of the article is mainly heated by the internal radiant heating unit. A partition wall is disposed between the outer and inner radiant heating units. Radiation light emitted by each radiant heating unit is reflected by the partition wall so that the radiation light is separated from that emitted by the other radiant heating unit, whereby an area is defined in which the article is heated by each radiant heating unit. Accordingly, a larger article, particularly a substrate-shaped article, can be heated uniformly.
Claims15
A radiant heating apparatus for heating an article to be treated, comprising:
- a plurality of nested radiant heating units including an outer radiant heating unit and an inner radiant heating unit to heat the article to be treated;
- and
- a partition wall disposed between the outer radiant heating unit and the inner radiant heating unit and extending toward the article to be treated so as to define an area in which the article to be treated is heated by each radiant heating unit.
A radiant heating method which uses a plurality of nested radiant heating units including at least an outer radiant heating unit and an inner radiant heating unit located inside the outer radiant heating unit, wherein a peripheral portion of an article to be treated is mainly heated by said outer radiant heating unit, while a central portion of the article is mainly heated by said inner radiant heating unit, and radiation light emitted by each radiant heating unit is reflected by a partition wall disposed between the outer radiant heating unit and the inner radiant heating unit and extending toward the article to be treated so that the radiation light emitted by each radiant heating unit is separated from that emitted by the other radiant heating units so as to define an area in which the article is heated by each radiant heating unit.
Dependencies are inferred from the claim text.