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US 5,856,215 AGranted
Method of fabricating a CMOS transistor
AssigneeHyundai Electronics Industries Co., Ltd.
InventorChae Hyun Jung
Life of this patent
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Abstract
The present invention relates to a method of fabricating a CMOS transistor which can further reduce the size of a chip since it is not necessary to consider the metal contact process margin since a gate electrode of a PMOS transistor and a gate electrode of an NMOS transistor are directly connected with a polysilicon wiring during a process of forming the gate electrodes, which can prevent the formation of a parasitic transistor by forming a cell space region in an active region below the polysilicon wiring.
Claims4
A method of fabricating a CMOS transistor, comprising:
- forming an N-well in a portion of a P-substrate;
- defining field regions and active regions on said N-well and said P-substrate using an element separation process;
- forming a field oxide film in said field regions, respectively;
- forming a first N.sup.+ diffusion region between said active regions at an edge of said N-well;
- forming a common gate electrode on said P-substrate and said N-well;
- forming a first source and drain in said N-well having said common sate electrode as a first gate to form a PMOS transistor;
- forming a second source and drain in said P-substrate having said common gate electrode as a second gate to form an NMOS transistor;
- forming a second N.sup.+ diffusion region along said edge of said N-well, wherein said second N.sup.+ diffusion region is connected to said first N.sup.+ diffusion region at said edge of said N-well;
- forming an interlayer insulation film on the resulting structure after forming said second N.sup.+ diffusion region;
- and
- connecting, through a metal contact process, said first junction portion and said third junction portion with a first metal wiring, and second junction portion and said fourth junction portion with a second metal wiring.
8 more elements
Dependencies are inferred from the claim text.