Method of fabricating a programmable function system block using two masks and a sacrificial oxide layer between the bottom metal and an amorphous silicon antifuse structure
AssigneeVLSI Technology, Inc.
InventorsMichela S. Love, Delbert H. Parks
Life of this patent
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Abstract
An antifuse structure is formed between two metal contacts in which a thin oxide layer is formed on the first or bottom metal, a shallow via is provided oxide layer and a layer of amorphous silicon is deposited over the thin oxide and into the shallow via without leaving the usual furrows in the amorphous silicon and thereby eliminating the step coverage problems of cusps forming in the subsequently applied second or top metal.
Claims13
A method for forming an antifuse structure, comprising the steps of:
- providing an electrically conductive substrate;
- forming a thin non-conductive barrier layer over said substrate;
- forming an opening in said barrier layer through to said electrically conductive substrate;
- depositing antifuse material over said barrier layer and in said barrier layer opening;
- depositing an electrically conductive material over said antifuse material;
- forming a mask over said electrically conductive material, wherein said mask completely covers said opening in said barrier layer;
- removing said electrically conductive material and said antifuse material except for regions thereof covered by said mask;
- and
- removing said barrier layer except for regions thereof covered by remaining portions of said antifuse material.
A method for forming an antifuse structure comprising:
- providing an electrically conductive substrate;
- forming a thin non-conductive barrier layer over said substrate;
- said barrier layer having a thickness of about 50 nanometers or less;
- forming an opening in said barrier layer through to said substrate;
- depositing an antifuse material into said opening;
- and
- depositing an electrically conductive material over said antifuse material.
A method for forming antifuse structures comprising:
- providing a substrate of a first metal;
- forming a thin silicon dioxide barrier layer over said substrate;
- said barrier layer having a thickness of about 50 nanometers or less;
- depositing a first mask over said barrier layer with openings in said mask where antifuses are to be formed;
- etching said barrier layer through to the surface of said substrate in those areas left uncovered by said mask to provide openings in said barrier layer;
- stripping said first mask;
- depositing amorphous silicon over said barrier layer and into said openings;
- depositing a second metal over said amorphous silicon;
- removing said second metal and said amorphous silicon except in those areas where antifuses are to be formed;
- and
- removing the barrier layer surrounding the remaining amorphous silicon and said second metal.
A method for forming antifuse structures comprising:
- providing a substrate of a first metal;
- forming a thin silicon dioxide barrier layer over said substrate;
- said barrier layer having a thickness of about 50 nanometers or less;
- depositing a first mask over said barrier layer with openings in said mask where antifuses are to be formed;
- etching said barrier layer through to the surface of said substrate in those areas left uncovered by said mask to provide openings in said barrier layer;
- stripping said first mask;
- depositing amorphous silicon over said barrier layer and into said openings;
- depositing a second metal over said amorphous silicon;
- depositing a second mask over said second metal in those areas where antifuses are to be formed;
- etching said second metal and said amorphous silicon through to the surface of said barrier layer;
- removing the barrier layer surrounding the remaining amorphous silicon and second metal;
- and
- stripping said second mask.
Dependencies are inferred from the claim text.