US 5,854,302 A · Partially polymerized divinylsiloxane linked bisbenzocyclobutene resins and methods for making said resins

Abstract

A process for forming a partially polymerized DVS resin comprising heating DVS monomer (1,3-bis(2-bicyclo4.2.0!octa-1,3,5-trien-3-ylethenyl)-1,1,3,3-tetramethyl disiloxane) in a solvent at a concentration of DVS monomer in the solvent such that: (a) the DVS resin, when applied and polymerized in a thin layer on a solid substrate does not craze; and (b) the DVS resin, is rendered photocurable by the addition of at least one photosensitive agent in an amount sufficient to convert the mixture to an organic-insoluble solid upon exposing the mixture to photon radiation and the film retention upon development with a solvent is at least 50 percent. The DVS resin may be used as an interlayer dielectric to fabricate thin film multichip modules.

Claims6

Dependent claims

A DVS resin formed by a process comprising heating DVS monomer in a solvent at an initial concentration of DVS monomer in the solvent of from about 12 to about 32 weight percent such that:

(a) the DVS resin, when applied and polymerized in a thin layer on a solid substrate does not craze;
and
(b) the DVS resin, when formulated by adding three weight percent 2,6-bis(4-azidobenzylidene)-4-methylcyclohexanone, spun coated onto a substrate, exposed to a photon source to cure at least a portion of the resin formulation beyond its gel point, any unexposed portions of the formulation are removed with a solvent and the photocured resin is finally cured with heat, one obtains a film retention of at least 75 percent,
which DVS resin
(1) has a weight average molecular weight of greater than 90,000 g/mole as determined by size exclusion chromatography using narrow molecular weight range linear atactic polystyrene polymers as standards;
(2) is soluble in mesitylene;
and
(3) is not polymerized beyond its gel point.

5 more elements

Dependencies are inferred from the claim text.

Partially polymerized divinylsiloxane linked bisbenzocyclobutene resins and methods for making said resins

Life of this patent

Partially polymerized divinylsiloxane linked bisbenzocyclobutene resins and methods for making said resins

Life of this patent

Abstract

Claims6