Transfer machine, transfer method, cleaning machine, and cleaning method
AssigneeTokyo Electron Limited
InventorYoshiyuki Honda
Life of this patent
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AssigneeTokyo Electron Limited
InventorYoshiyuki Honda
Estimating the term…
A transfer machine having a pair of holding members disposed opposite to each other to hold a plurality of objects arranged at their peripheral edges. A drive mechanism selectively moves the holding members toward and away from each other in order to selectively hold and release the objects by the holding members. A transfer mechanism transfers the objects and the holding members to a bath in order to process the objects in the bath. Each of the holding members has a plurality of holding notches for holding the peripheral edges of the objects, and the notches are disposed in upper and lower holders which are arranged parallel to each other. The holding notches of the upper holder have a first taper part positioned adjacent an opening of the notch and a second taper part positioned adjacent a notch bottom, and the first taper part has an opening angle larger than an opening angle of the second taper part.
A transfer machine comprising:
A transfer method comprising the steps of:
A cleaning machine comprising:
A cleaning method comprising:
A cleaning machine comprising:
Dependencies are inferred from the claim text.