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US 5,853,471 AGranted
Composition for anti-reflection coating
AssigneeHoechst Japan Limited
InventorsTakeo Yoshida, Hatsuyuki Tanaka
Life of this patent
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Abstract
Disclosed herein is a composition for anti-reflection coating which comprises a perfluoroalkyl sulfonic acid, an organic amine, a polyvinyl pyrrolidone, a water-soluble alkylsiloxane polymer, and water. The composition is able to be an anti-reflection coating film which has a low refractive index, reduces the degree of forming insoluble layer, and does not generate fine particles and minute crystalline matters in its surface layer.
Claims20
An anti-reflection coating composition comprising:
- (a) from 2 to 7 parts by weight (pbw) of a perfluoroalkyl sulfonic acid;
- (b) from 0.2-1 pbw of an organic amine;
- (c) 1 pbw of a polyvinylpyrrolidone;
- (d) from 0.001-0.10 pbw of a water-soluble alkylsiloxane polymer;
- and
- (e) from 50 to 100 minus the total amount of components (a)-(d) pbw of water,
- wherein the parts by weight are based on 100 parts of (a) through (e).
4 more elements
An anti-reflection coating composition comprising:
- (a) from 3 to 5 parts by weight (pbw) of a perfluoroalkyl sulfonic acid;
- (b) from 0.2-0.6 pbw of an organic amine;
- (c) 1 pbw of a polyvinylpyrrolidone;
- (d) from 0.001-0.10 pbw of a water-soluble alkylsiloxane polymer;
- and
- (e) from 50 to 100 minus the total amount of components (a)-(d) pbw of water,
- wherein the parts by weight are based on 100 parts of (a) through (e).
4 more elements
An anti-reflection coating composition comprising:
- (a) a perfluoroalkyl sulfonic acid;
- (b) an organic amine;
- (c) a polyvinylpyrrolidone;
- (d) a water-soluble alkylsiloxane polymer;
- and
- (e) water,
- wherein the polyvinyl pyrrolidone and the perfluoroalkyl sulfonic acid are present in a weight ratio of 1:3-1:5 and the polyvinyl pyrrolidone and the organic amine are present in a weight ratio of 1:0.3-1:0.5.
4 more elements
Dependencies are inferred from the claim text.