Notched wafer aligning apparatus
AssigneeKaijo Corporation
InventorsRyo Ohzeki, Tadayasu Ohsawa
Life of this patent
Estimating the term…
Abstract
A notched wafer aligning apparatus capable of aligning a number of notched wafers received in a cassette with each other at a predetermined position and facilitating shifting of the thus-aligned wafers to any desired position. A plurality of notch detection rollers are rotatably arranged in juxtaposition to each other on a rotation drive shaft so as to be rotated while being abutted against a lower portion of peripheral edges of the wafers through a lower open end of the cassette. The notch detection rollers are individually rotated due to friction between the notch detection rollers and the rotation drive shaft.
Claims33
A notched wafer aligning apparatus for aligning a plurality of notched wafers arranged in juxtaposition to each other in a cassette with each other, comprising:
- a plurality of notch detection rollers rotatably arranged so as to be rotationally driven while being respectively abutted against peripheral edges of the notched wafers to orientate notches of the wafers in the same direction;
- said notch detection rollers being rotatably mounted on a rotation drive shaft in juxtaposition to each other while being arranged in correspondence to the notched wafers and at a position deviated by a predetermined distance from a vertical center line of the notched wafers;
- said notch detection rollers being individually rotated on said rotation drive shaft by frictional force between said notch detection rollers and said rotation drive shaft to move the notched wafers in the cassette, to thereby orientate the notched wafers in the same direction.
Dependencies are inferred from the claim text.