US 5,853,214 A · Aligner for a substrate carrier

Abstract

A substrate aligner for a substrate carrier or cassette including an engagement assembly for moving and maintaining one or more substrates into an aligned position when closed, and an actuator assembly for opening and closing the engagement assembly. In one embodiment, the engagement assembly includes front and back engagement assemblies for mounting at opposite corners of the housing to thereby interface opposite comers of the substrates. Each engagement assembly preferably includes a roller for interfacing a corresponding edge of each the substrates, where the front assembly includes two rollers for interfacing front edges and adjacent side edges, and the back engagement assembly includes two rollers for interfacing the back edges and the opposite side edges of the substrates. In this manner, the engagement assembly interfaces all four edges of each substrate to thereby manipulate and maintain the substrates into a substantially aligned position when closed. The rollers preferably rotate to avoid scraping of the substrate edges which might otherwise generate contaminating particulate. Furthermore, the rollers have compliant outer surfaces to dampen potentially damaging forces. Thus, the compliant rollers sufficiently constrain the substrates to prevent significant movement, while also protecting the substrates from g-forces, harsh movements and vibrations during transport. The actuator assembly preferably includes a bistable, four bar linkage including two stable and locked modes corresponding to the open and closed positions. In an alternative embodiment, the housing includes back stops and front bumpers to facilitate front to back alignment, and side-mounted single-roller assemblies for lateral alignment.

Claims50

Dependent claims

A substrate aligner for a substrate carrier, the carrier including a housing for receiving and supporting a plurality of substrates in a spaced relationship relative to each other, said substrate aligner comprising:

an engagement assembly for mounting to the housing for engaging, moving and maintaining the plurality of substrates into a substantially linearly and rotationally aligned position when said engagement assembly is moved to a closed position and for being disengaged from the plurality of substrates when in an open position for allowing insertion and extraction of the plurality of substrates;
and
an actuator assembly for mounting to the housing and operatively coupled to move said engagement assembly between said open and closed positions.

A substrate aligner for use with a substrate carrier, the carrier including a substantially rectangular housing for receiving and supporting a plurality of substrates in a spaced relationship relative to each other, said substrate aligner comprising:

an engagement assembly including a front engagement assembly and a back engagement assembly, said front and back engagement assemblies each being configured for mounting to the housing for engaging and maintaining the plurality of substrates in a substantially aligned position when said engagement assembly is moved to a closed position and for disengaging the plurality of substrates when in an open position to allow insertion and extraction of the plurality of substrates, wherein each of said front and back engagement assemblies further includes first and second engagement members that are configured for engaging adjacent edges of each of the plurality of substrates when said front and back engagement assemblies are in closed positions;
and
an actuator assembly configured for mounting to the housing and operatively coupled to said engagement assembly to move said engagement assembly between said open and closed positions.

A substrate aligner for a substrate carrier, the substrate carrier including a substantially rectangular housing having front and back sides for receiving and supporting a plurality of substrates in a spaced relationship relative to each other, said substrate aligner comprising:

back stops for mounting to the back side of the housing for engaging back edges of the plurality of substrates;
a pivotally mounted front door with front bumpers for engaging front edges of the plurality of substrates when the front door is closed, so that the plurality of substrates are moved and substantially aligned in the front to back direction of the housing when said front door is closed;
first and second engagement assemblies for mounting on opposite sides of the housing for engaging opposite side edges, respectively, of the plurality of substrates and for moving the substrates into a laterally aligned position when said first and second engagement assemblies are moved from said open position to said closed position;
and
an actuator assembly for mounting to the housing and operatively coupled to move said engagement assembly between said open and closed positions;
wherein the plurality of substrates are maintained in a substantially aligned position when said front door is closed and when said first and second engagement assemblies are in said closed position.

3 more elements

Dependencies are inferred from the claim text.

Aligner for a substrate carrier

Life of this patent

Aligner for a substrate carrier

Life of this patent

Abstract

Claims50