Diamond film with sharp field emission turn-on
AssigneeCrystallume
InventorsWilliam Phillips, John M. Pinneo
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Abstract
An ultrasmooth diamond film has a thickness greater than about ten microns and an average grain size less than about 0.5 micron. The ultrasmooth diamond film of the present invention is grown using ordinary microwave plasma CVD methods, with a metal vapor source included in the reactor to produce vapor during the growth of the film. The metal vapor source may be chosen from the first row transition elements, chromium, iron, cobalt, and nickel, or from the lanthanides praseodymium, europium, or erbium. Any metal capable of existing in the vapor phase in the presence of the hydrogen plasma, will cause formation of the ultrasmooth film of the present invention.
Claims2
A field emission cathode comprising:
- A synthetic diamond film having a sharp turn-on characteristic for field emission current, said sharp turn-on characteristic being a 100-fold increase in field emission current density in response to an increase of less than about 3 volts/micron in an applied filed across said diamond film, said synthetic diamond film having a grain size less than about 0.5 micron and a thickness greater than about 10 microns, said diamond film being substantially free of metal inclusion.
Dependencies are inferred from the claim text.