Acoustic sensor as proximity detector
AssigneeKLA-Tencor Corporation
InventorsAmin Samsavar, Thomas McWaid, Sergey Yudin
Life of this patent
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Abstract
An acoustic sensor used with a first sensor (such as a profilometer, scanning probe microscope or the like) allows for the positioning of the first sensor with respect to the sample. The acoustic sensor has a greater range than a profilometer or a scanning probe microscope, and a relatively quick response time, which allows it to be an effective proximity detector. Additionally, the acoustic sensor is not affected by the material of the sample's surface layer.
Claims42
An instrument for sensing a sample, comprising:
- a first sensor, the first sensor being a profiling device for sensing the sample;
- a separate acoustic sensor having a known positional relation to the first sensor, the acoustic sensor adapted to produce an acoustic sensor signal, the acoustic sensor signal being indicative of the distance from the sample to the acoustic sensor;
- positioning means causing relative motion between the sample and the first sensor;
- and
- a controller adapted to receive the acoustic sensor signal and control the positioning means.
An instrument for sensing a sample, comprising:
- a first sensor;
- an acoustic sensor having a known positional relation to the first sensor, the acoustic sensor adapted to produce an acoustic sensor signal;
- positioning means causing relative motion between the sample and the first sensor;
- and
- a controller adapted to receive the acoustic sensor signal and control the positioning means, wherein the controller is adapted to control the positioning means to reduce the distance between the sample and the first sensor, wherein the reduction of the distance between the sample and the first sensor has a rate of speed, wherein the controller is adapted to change this rate of speed.
An instrument for sensing a sample, comprising:
- a first sensor;
- an acoustic sensor having a known positional relation to the first sensor, the acoustic sensor adapted to produce an acoustic sensor signal;
- positioning means causing relative motion between the sample and the first sensor, the positioning means including an X-Y translator attached to the first sensor;
- and
- a controller adapted to receive the acoustic sensor signal and control the positioning means, wherein the acoustic sensor is not attached to the X-Y translator.
An instrument for sensing a sample, comprising:
- a first sensor, the first sensor including an optical element;
- an acoustic sensor having a known positional relation to the first sensor, the acoustic sensor adapted to produce an acoustic sensor signal;
- positioning means causing relative motion between the sample and the first sensor;
- and
- a controller adapted to receive the acoustic sensor signal and control the positioning means, wherein the optical element has a focus and wherein the controller uses the acoustic sensor signal to adjust the position of the optical element so that the sample is near the focus of the optical element.
An instrument for sensing a sample, comprising:
- a first sensor;
- an acoustic sensor having a known positional relation to the first sensor, the acoustic sensor adapted to produce an acoustic sensor signal, the acoustic sensor comprising a transmitter and a detector;
- positioning means causing relative motion between the sample and the first sensor;
- and
- a controller adapted to receive the acoustic sensor signal and control the positioning means, wherein the transmitter produces a transmitted signal having a frequency of less than 20 KHz.
A method of operating a sensing instrument comprising:
- detecting a sample with an acoustic sensor to produce an acoustic sensor signal;
- determining from the acoustic sensor signal the distance between a first sensor and a sample, the first sensor being physically separate from the acoustic sensor and the first sensor being adapted to profile the sample;
- and
- adjusting the position of the first sensor with respect to the sample.
A method of operating a sensing instrument comprising:
- detecting a sample with an acoustic sensor to produce an acoustic sensor signal;
- determining from the acoustic sensor signal the distance between a first sensor and a sample;
- and
- adjusting the position of the first sensor with respect to the sample, wherein the first sensor includes an optical element and wherein the preferred operating distance is a range where the focus of the optical element is near the sample.
A method of operating a sensing instrument comprising:
- detecting a sample with an acoustic sensor to produce an acoustic sensor signal;
- determining from the acoustic sensor signal the distance between a first sensor and a sample;
- and
- adjusting the position of the first sensor with respect to the sample, wherein the first sensor has a preferred operating distance range from the sample, wherein the adjusting step is done such that the sample is within the preferred operating range of the first sensor, wherein the determining and adjusting steps include determining a reference value of the acoustic sensor signal in which the first sensor is within the operating range, and moving the first sensor along the Z-axis so that the acoustic sensor signal matches the reference value.
A method of operating a sensing instrument comprising:
- detecting a sample with an acoustic sensor to produce an acoustic sensor signal;
- determining from the acoustic sensor signal the distance between a first sensor and a sample;
- and
- adjusting the position of the first sensor with respect to the sample, wherein the first sensor has a preferred operating distance range from the sample, wherein the adjusting step is done such that the sample is within the preferred operating range of the first sensor, wherein the first sensor is a probe and in the preferred operating distance the probe contacts the sample, further comprising modifying the relative positions of the sample with respect to the acoustic sensor in the X-Y plane while maintaining the first sensor in the operating range.
A method of operating a sensing instrument comprising:
- moving a first sensor toward a sample at a first speed;
- detecting the sample with an acoustic sensor to produce an acoustic sensor signal;
- using the acoustic sensor signal to determine the distance between the sample and acoustic sensor;
- and
- changing the speed of the first sensor toward the sample.
Dependencies are inferred from the claim text.