Integrated circuit and method for forming and integrated circuit

A method for forming an integrated circuit comprising:

• providing a substrate comprising a node to which electrical connection is to be made;
• providing a layer of material outwardly of the node, and wherein the layer of material comprises a composite of a first layer which is provided outwardly of the node, a second layer which is provided outwardly of the first layer, and a third layer which is provided outwardly of the second layer;
• wherein the first and third layers are electrically conductive, and the second layer is electrically insulative;
• and
• isotropically etching the first and third layers substantially selectively relative to the second layer to provide a discontinuity in the first and third layers of materials;
• and
• providing an electrically conductive plug through the layer of material in electrical connection with the underlying node and which forms an interlocking discontinuity which effectively prevents displacement of the electrically conductive plug from the node.

A method for forming an integrated circuit comprising:

• providing a substrate comprising a node to which electrical connection is to be made;
• providing a layer of material outwardly of the node, and wherein the layer of material comprises a composite of a first layer which is provided outwardly of the node, a second layer which is provided outwardly of the first layer, and a third layer which is provided outwardly of the second layer;
• wherein the second and third layers are electrically conductive and the first layer is electrically insulative;
• and isotropically etching the first layer substantially selectively relative to the second and third layers to provide a discontinuity in the first layer of material;
• and
• providing an electrically conductive plug through the layer of material in electrical connection with the underlying node and which forms an interlocking discontinuity which effectively prevents displacement of the electrically conductive plug from the node.