Method and apparatus for aligning the position of die on a wafer table
AssigneeTexas Instruments Incorporated
InventorSubramanian Balamurugan
Life of this patent
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Abstract
A method for determining the position of a die on a wafer table after a wafer (20) has been cut includes stepping the wafer table (22) a series of one die lengths diagonally and after each step compare the die pattern to a reference die to determine street widths between dies. The widths are then averaged. This averaged street width is added to the die length to at the computer (26) to determine the jump distance between good dies. The distance from the reference die is continuously updated and this is used with the average street width to compute the next die position to jump. If the jump to the next die is unsuccessful, jump back to mid-point and if that is unsuccessful, reiterate mid-point jumps until successful.
Claims5
A method for relative positioning a die on a wafer table with respect to a die pickup device after cutting a wafer into dies comprising the steps of:
- measuring street widths between at least two adjacent dies in both horizontal and vertical direction;
- averaging said measured street widths;
- generating a control signal proportional to an average street width plus a nominal die dimension;
- and
- moving said die pickup device relative to a wafer table a distance defined by the control signal.
A method for positioning a die pickup device relative to a wafer with a plurality of dies displaced on a wafer table comprising the steps of:
- measuring street widths between at least two adjacent dies in each of two orthogonal directions;
- averaging the measured street widths in each said orthogonal directions;
- generating control signals proportional to the average street width in each said orthogonal directions plus the nominal die dimension in each said orthogonal directions;
- and
- moving said die pickup device relative to the wafer table a distance in each orthogonal direction defined by said control signals.
Dependencies are inferred from the claim text.