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US 5,851,738 AGranted
Method comprising substrates coated with an antihalation layer that contains a resin binder comprising anthracene units
AssigneeShipley Company, L.L.C.
InventorsJames W. Thackeray, George W. Orsula
Life of this patent
Estimating the term…
Abstract
Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
Claims29
A method for forming a relief image on a substrate, the method comprising:
- applying on the substrate a layer of an antihalation composition comprising a resin binder and a crosslinker, the resin binder having anthracene units therein and the resin binder capable of reacting with the crosslinker, and the crosslinker capable of causing a thermally-activated crosslinking reaction of the resin binder,
- applying over said antihalation composition layer a layer of a photoresist composition comprising a resin binder and a radiation senstive component, and
- imagewise exposing the photoresist composition layer to activating radiation and developing the exposed photoresist composition layer.
Dependencies are inferred from the claim text.