Process for defining resist patterns
AssigneeMicron Technology, Inc.
InventorChristophe Pierrat
Life of this patent
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Abstract
A process for forming patterns in resist material on a semiconductor wafer that uses two masks to define a pattern instead of a single conventional mask to define the pattern. The present invention realizes better process latitude and resolution for a given feature size than did the prior art.
Claims12
A process of defining a pattern of a desired width in resist material on a semiconductor wafer, comprising:
- defining one edge of the pattern by exposing a first portion of the resist material to a resist modifying source through a first mask having first opaque portions;
- and
- defining another edge of the pattern by exposing a second portion of the resist material to a resist modifying source through a second different mask having second opaque portions, the opaque portions of the first and second masks overlapping by a distance correlative to the desired width of the pattern.
A process of manufacturing a semiconductor device comprising:
- depositing a resist material on a wafer of semiconductor material;
- exposing a portion of the resist material to a resist modifying source through a first mask to define one edge of a desired pattern in the resist material;
- and
- exposing another portion of the resist material to a resist modifying source through a second different mask to define another edge of the desired pattern in the resist material, wherein opaque portions of the first and second masks overlap by a distance correlative to the desired width of the pattern.
A method of defining a pattern having a width in resist material on a semiconductor wafer, the method comprising the steps of;
- exposing a first portion of the resist material to a resist modifying source through a first mask to define a first edge of the pattern;
- and
- exposing a second portion of the resist material to a resist modifying source through a second different mask to define a second edge of the pattern, the second edge being spaced from the first edge by the width.
A method of creating a patter having a width in resist material on a semiconductor wafer, the method comprising the steps of:
- modifying a first portion of the resist material using a first mask to define a first edge of the pattern;
- modifying a second portion of the resist material using a second different mask to define a second edge of the pattern;
- and
- removing the first and second modified portions of the resist material to leave the pattern on the semiconductor wafer, wherein the first edge of the pattern and the second edge of the pattern are spaced apart by the width.
A method of defining a pattern having a width in resist material on a semiconductor wafer, the method comprising the steps of:
- defining a first edge of the pattern by exposing a first portion of the resist material to a resist modifying source through a first mask;
- and
- defining a second edge of the pattern by exposing a second portion of the resist material to a resist modifying source through a second different mask, the second edge of the pattern being spaced from the first edge of the pattern by the width.
A method of defining a patter having a width in resist material on a semiconductor wafer, the method comprising the steps of:
- providing a first mask, the first mask having a first transparent portion and a first opaque portion being sized and positioned to define a first portion of the pattern;
- providing a second mask, the second different mask having a second transparent portion and a second opaque portion being sized and positioned to define a second portion of the pattern, the opaque portions of the first and second masks overlapping by a distance correlative to the width of the pattern;
- placing the first mask over the resist material on the semiconductor wafer;
- exposing a first portion of the resist material to a resist modifying source through the first mask;
- removing the first mask,
- placing the second mask over the resist material on the semiconductor wafer;
- and
- exposing a second portion of the resist material to a resist modifying source through the second mask.
A method of defining a pattern having a width in resist material on a semiconductor wafer, the method comprising the steps of:
- providing a first mask, the first mask having a first transparent portion and a first opaque portion being sized and positioned to define a first portion of the pattern;
- providing a second different mask, the second mask having a second transparent portion and a second opaque portion being sized and positioned to define a second portion of the pattern, the opaque portions of the first and second masks overlapping by a distance correlative to the width of the pattern;
- registering the first mask in a given position over the resist material on the semiconductor wafer;
- exposing a first portion of the resist modifying source through the first mask;
- removing the first mask;
- registering the second mask in the given position over the resist material on the semiconductor wafer;
- and
- exposing a second portion of the resist material to a resist modifying source through the second mask.
A method of creating a pattern having a width in resist material on a semiconductor wafer, the method comprising the steps of:
- providing a first mask, the first mask having a first transparent portion and a first opaque portion being sized and positioned to define a first portion of the pattern;
- providing a second different mask, the second mask having a second transparent portion and a second opaque portion being sized and positioned to define a second portion of the pattern;
- registering the first mask in a given position over the resist material on the semiconductor wafer;
- modifying a first portion of the resist material by exposing the first portion of the resist material to a resist modifying source through the first mask to define a first edge of the pattern;
- removing the first mask;
- registering the second mask in the given position over the resist material on the semiconductor wafer;
- modifying a second portion of the resist material by exposing the second portion of the resist material to a resist modifying source through the second mask to define a second edge of the pattern, the second edge being spaced from the first edge by the width;
- and
- removing the first and second modified portions of the resist material to leave the pattern on the semiconductor wafer.
Dependencies are inferred from the claim text.