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US 5,851,730 AGranted
Substrates coated with an antihalation layer that contains a resin binder comprising anthracene units
AssigneeShipley Company, L.L.C.
InventorsJames W. Thackeray, George W. Orsula
Life of this patent
Estimating the term…
Abstract
Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
Claims21
A coated substrate comprising:
- a substrate having thereon a coating layer of an antihalation composition and a coating layer of a photoresist over the antihalation composition coating layer,
- the layer of the antihalation composition comprising a resin binder and a crosslinker, the resin binder having anthracene units therein and the resin binder capable of reacting with the crosslinker, and the crosslinker compound capable of causing a crosslinking reaction of the resin binder,
- the photoresist comprising a resin binder and a radiation sensitive component.
Dependencies are inferred from the claim text.