Method for producing a chemically adsorbed film
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsShigeo Ikuta, Kazufumi Ogawa, Mamoru Soga
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Abstract
According to the present invention, a method for producing a chemically adsorbed film is provided. The method includes the steps of: irradiating a surface of a polymer substrate with ultraviolet laser light so as to produce a hydrophilic group on the surface of the polymer substrate; and contacting a chemical adsorption solution containing a chlorosilane-based chemical adsorbent and a nonaqueous solvent and the polymer substrate on which the hydrophilic group is produced; and reacting the hydrophilic group of the polymer substrate with a chlorosilyl group of the chlorosilane-based chemical adsorbent for forming a covalent bond, thereby forming a chemically adsorbed film on the surface of the polymer substrate.
Claims9
A method for producing a chemically adsorbed film comprising the steps of:
- irradiating a surface of a polymer substrate with ultraviolet laser light so as to produce a hydrophilic group on the surface of the polymer substrate, wherein the ultraviolet laser light is selectively irradiated onto a predetermined part of the surface of the polymer substrate;
- and
- contacting the surface of the polymer substrate on which the hydrophilic group is produced with a chemical adsorption solution containing a chlorosilane-containing chemical adsorbent and a nonaqueous solvent;
- and reacting the hydrophilic group of the polymer substrate with a chlorosilyl group of the chlorosilane-containing chemical adsorbent for forming a covalent bond, thereby forming a chemically adsorbed film on the surface of the polymer substrate.
A method for producing a chemically adsorbed film comprising the steps of:
- irradiating a surface of a polymer substrate with ultraviolet light including a wavelength of about 175 nm or less so as to produce a hydrophilic group on the surface of the polymer substrate, wherein the ultraviolet light including a wavelength of about 175 nm or less is selectively irradiated onto a predetermined part of the surface of the polymer substrate;
- and
- contacting the surface of the polymer substrate on which the hydrophilic group is produced with a chemical adsorption solution containing a chlorosilane-containing chemical adsorbent and a nonaqueous solvent;
- and reacting the hydrophilic group of the polymer substrate with a chlorosilyl group of the chlorosilane-containing chemical adsorbent for forming a covalent bond, thereby forming a chemically adsorbed film on the surface of the polymer substrate.
A method for producing a chemically adsorbed film comprising the steps of:
- irradiating a surface of a polymer substrate with ultraviolet laser light so as to produce a hydrophilic group on the surface of the polymer substrate, wherein the ultraviolet laser light is selectively irradiated onto a predetermined part of the surface of the polymer substrate;
- and
- contacting the surface of the polymer substrate on which the hydrophilic group is produced with a chemical adsorption solution containing a chlorosilane-containing chemical adsorbent and a nonaqueous solvent;
- and reacting the hydrophilic group of the polymer substrate with a chlorosilyl group of the chlorosilane-containing chemical adsorbent for forming a covalent bond, thereby forming a chemically adsorbed film on the surface of the polymer substrate,
- wherein the ultraviolet light is selected from the group consisting of excimer laser light, gas laser light and YAG laser light.
Dependencies are inferred from the claim text.