Evaluation method for semiconductor devices
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsToshiharu Katayama, Naoko Ohtani, Yukari Imai
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Abstract
A part of a gate insulation film between a semiconductor substrate and an exposed gate electrode of a semiconductor device is partially and stepwise etched away. A voltage is applied between the semiconductor substrate and the gate electrode in a chemical wet etching system at each step. An anode oxide film is formed on the surface of the gate electrode in a step, when a defect is included in a gate oxide film. The gate electrode is etched away in another step, when a defect is not included in the gate oxide film. A position of a defect in the gate insulation film is detected from the difference in the area of the gate insulation film when an anode oxide film is formed on the gate electrode, and when the gate electrode is etched away.
Claims5
An evaluation method for semiconductor devices comprising the steps of:
- partially and stepwise etching away a part of a gate insulation film between a semiconductor substrate and an exposed gate electrode of a semiconductor device;
- applying a voltage between said semiconductor substrate and the gate electrode in a chemical wet etching system at each step;
- and
- detecting a position of a defect in said gate insulation film from the difference in the area of the gate insulation film when an anode oxide film is formed on said gate electrode and when said gate electrode is etched away.
An evaluation method for semiconductor devices comprising the steps of:
- varying, in a chemical wet etching system, an applied voltage between a semiconductor substrate and an exposed gate electrode of a semiconductor device, between which a gate insulation film is sandwiched;
- and
- detecting a size of a defect in said gate insulation film by measuring the critical applied voltage between the applied voltage at which the exposed gate electrode is etched away and the applied voltage at which the exposed gate electrode is not etched away.
Dependencies are inferred from the claim text.