Scanning probe microscope incorporating an optical microscope

A scanning probe microscope incorporating an optical microscope, comprising:

• a beam element having a probe, opposed to a measurement sample;
• a laser light source for applying a laser light beam onto the beam element;
• means for detecting displacement of the beam element by receiving reflected light from the beam element;
• an optical system for performing optical observation of the sample, the optical system including an objective lens opposed to the beam element interposing the sample therebetween, and an eyepiece enabling an observer to perform ocular observation;
• and
• light interception means for intercepting a portion of the laser light directed to the eyepiece passing through the objective lens;
• wherein the light interceptions means includes a through hole permitting passage of light therethrough and a slider for closing the through hole;
• and
• wherein the slider includes an optical filter for preventing the passage of light in a certain wave range including a wavelength of the laser light and for allowing the passage of light in other wave ranges, whereby the slider closes the through hole with the filter.

A scanning probe microscope incorporating an optical microscope, comprising:

• a beam element having a probe, opposed to a measurement sample;
• a laser light source for applying a laser light beam onto the beam element;
• means for detecting displacement of the beam element by receiving reflected light from the beam element;
• an optical system for performing optical observation of the sample, the optical system including an objective lens opposed to the beam element interposing the sample therebetween, and an eyepiece enabling an observer to perform ocular observation;
• and
• light interception means for intercepting a portion of the laser light directed to the eyepiece passing through the objective lens;
• wherein the light interception means includes a through hole permitting passage of light therethrough and a slider for closing the through hole;
• and
• wherein the scanning probe microscope further comprises means for controlling an on/off operation of the laser source in response to an open/close operation of the through hole.

A scanning probe microscope incorporating an optical microscope, comprising:

• means for making an SPM measurement on a measurement sample, the SPM measurement means including a beam element having a probe and means for optically detecting the displacement of the element, the displacement detecting means including a laser light source for emitting laser light;
• an optical system for performing optical observation of at least the measurement sample, the optical system including an eyepiece enabling an observer to perform ocular observation;
• and
• light interception means for intercepting light directed to the eyepiece from the measurement sample;
• wherein the light interception means comprises shutter means for controlling a transmission/interception operation of the light directed to the eyepiece from the sample;
• wherein the shutter means includes a through hole permitting passage of light therethrough and a slider for closing the through hole;
• and
• wherein the slider includes an optical filter for preventing the passage of light in a certain wave range including a wavelength of the laser light and for allowing the passage of light in other wave ranges, whereby the slider closes the through hole with the filter.

A scanning probe microscope incorporating an optical microscope, comprising:

• an SPM measurement unit for making an SPM measurement on a measurement sample, the SPM measurement unit including a cantilever having a probe on a free end thereof and a displacement detection system for optically detecting a displacement of the cantilever, the displacement detection system including a laser light source for emitting laser light;
• an optical system for performing optical observation of at least the measurement sample, the optical system including an eyepiece enabling an observer to perform ocular observation;
• a shutter for controlling a transmission/interception operation of light directed to the eyepiece from the sample;
• and
• a controller for providing a control signal for on/off operation of the laser light source, and a logic circuit for controlling the on/off operation of the laser light source in response to the control signal and an open/close operation of the shutter.

A scanning probe microscope incorporating an optical microscope, comprising:

• a beam element having a probe, opposed to a measurement sample;
• a laser light source for applying a laser light beam onto the beam element;
• a displacement detection system for detecting displacement of the beam element by receiving reflected light from the beam element;
• an optical system for performing optical observation of the sample, the optical system including an objective lens opposed to the beam element interposing the sample therebetween, and an eyepiece enabling an observer to perform ocular observation;
• and
• a shutter for intercepting a portion of the laser light directed to the eyepiece passing through the objective lens;
• wherein the shutter includes a through hole permitting passage of light therethrough and a slider for closing the through hole;
• and
• wherein the slider includes an optical filter for preventing the passage of light in a certain wave range including a wavelength of the laser light and for allowing the passage of light in other wave ranges, whereby the slider closes the through hole with the filter.

A scanning probe microscope incorporating an optical microscope, comprising:

• a beam element having a probe, opposed to a measurement sample;
• a laser light source for applying a laser light beam onto the beam element;
• a displacement detection system for detecting displacement of the beam element by receiving reflected light from the beam element;
• an optical system for performing optical observation of the sample, the optical system including an objective lens opposed to the beam element interposing the sample therebetween, and an eyepiece enabling an observer to perform ocular observation;
• and
• a shutter for intercepting a portion of the laser light directed to the eyepiece passing through the objective lens;
• wherein the shutter includes a through hole permitting passage of light therethrough and a slider for closing the through hole;
• and
• wherein the scanning probe microscope further comprises a controller for providing a control signal for on/off operation of the laser light source, and a logic circuit for controlling the on/off operation of the laser light source in response to the control signal and an open/close operation of the throughhole.

A scanning probe microscope incorporating an optical microscope, comprising:

• an SPM measurement unit for making an SPM measurement on a measurement sample, the SPM measurement unit including a beam element having a probe and a displacement detection system for optically detecting the displacement of the element, the displacement detecting system including a laser light source for emitting laser light;
• an optical system for performing optical observation of at least the measurement sample, the optical system including an eyepiece enabling an observer to perform ocular observation;
• and
• a shutter for intercepting light directed to the eyepiece from the measurement sample and for controlling a transmission/interception operation of the light directed to the eyepiece from the sample;
• wherein the shutter includes a through hole permitting the passage of light therethrough and a slider for closing the through hole;
• and
• wherein the slider includes an optical filter for preventing the passage of light in a certain wave range including a wavelength of the laser light and for allowing the passage of light in other wave ranges, whereby the slider closes the through hole with the filter.