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US 5,848,089 AGranted
Excimer laser with magnetic bearings supporting fan
AssigneeCymer, Inc.
InventorsKamal Sarkar, Richard C. Ujazdowski, Palash P. Das, Donald G. Larson
Life of this patent
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Abstract
An electric discharge gas laser having a laser cavity in which is contained a laser gas and a fan for circulating the laser gas. The fan is supported by an active magnetic bearing system and driven by a brushless DC motor in which the rotor of the motor and at least two magnetic bearings sealed within the gas environment of the laser cavity and the motor stator and the coils of the bearing magnets are located outside the gas environment.
Claims12
An electric discharge gas laser comprising
- A. a housing structure having walls forming an internal laser cavity;
- B. a gas located within the laser cavity, said gas being capable of lasing action;
- C. a pair of elongated spaced electrodes located within the laser cavity and forming an electrical discharge region between the electrodes for stimulating gas within the discharge region to lasing action in accordance with an electrical discharge between the electrodes;
- D. a rotating fan having a shaft located within the laser cavity for circulating the gas through the discharge region;
- E. a brushless DC motor comprising a stator and a rotor for providing rotation to the fan;
- F. at least two magnetic bearings, each comprising stator and a rotor and position sensors for providing radial support to said shaft;
- G. said rotors of said motor and said at least two magnetic bearings, each being coupled directly or indirectly to said shaft;
- and
- H. at least one sealing member interposed between said rotors and said stators to enclose said rotors with said sealing member sealed to the housing structure to have said rotors effectively sealed within the gas environment and the stators without the gas environment.
6 more elements
Dependencies are inferred from the claim text.