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US 5,847,444 AGranted
Semiconductor device with reduced aspect ratio contact hole
AssigneeNEC Corporation
InventorYasushi Yamazaki
Life of this patent
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Abstract
A semiconductor device has a memory cell area which contains a component having a height and a peripheral circuit area free of a component having a height. The first area includes a interlayer insulating film comprising a first interlayer film as an uppermost insulating film. The second area includes an interlayer insulating film comprising the first interlayer film and a second interlayer film disposed directly on the first interlayer film and having a chemical mechanical polishing rate greater than the first interlayer film. The interlayer insulating film in the memory cell area has a surface higher than the interlayer insulating film in the peripheral circuit area.
Claims8
A semiconductor device comprising:
- a first area of the semiconductor device with a component having a height,
- said first area including a first insulating layer atop the component that has a topmost first interlayer film whose top surface is at a first level;
- a second area of the semiconductor device that is free of a component having a height,
- said second area including a second insulating layer with a second interlayer film atop said first interlayer film, a top surface of said second interlayer film being at a second level lower than said first level,
- said second interlayer film having a chemical mechanical polishing rate higher than that of said first interlayer film;
- and
- a contact hole in said second area that extends downward from said second level through said first and second interlayer films into contact with a conductive layer beneath said second insulating layer,
- said contact hole having its interior periphery covered with an electrically conductive interconnect material, said interconnect material extending above said contact hole to at least said first level,
- wherein an aspect ratio of said contact hole is reduced from that if said hole were extended downward from said first level.
6 more elements
A DRAM comprising:
- a memory area with a stacked-type capacitor having a height,
- said memory area including a first insulating layer atop the capacitor that has a topmost first interlayer film whose top surface is at a first level;
- a peripheral circuit that is free of a component having a height,
- said peripheral circuit including a second insulating layer with a second interlayer film atop said first interlayer film, a top surface of said second interlayer film being at a second level lower than said first level,
- said second interlayer film having a chemical mechanical polishing rate higher than that of said first interlayer film;
- and
- a contact hole in said peripheral circuit that extends downward from said second level through said first and second interlayer films into contact with a conductive layer beneath said second insulating layer,
- said contact hole having its interior periphery covered with an electrically conductive interconnect material, said interconnect material extending above said contact hole,
- wherein an aspect ratio of said contact hole is reduced from that if said hole were extended downward from said first level, and, wherein said first interlayer film is NSG and said second interlayer film is BPSG.
6 more elements
A DRAM comprising:
- a memory cell area with stacked-type capacitors having a height,
- said memory cell area including a first insulating layer atop said capacitors that has a topmost NSG film whose top surface is at a first level;
- a peripheral circuit area that is free of a component having a height,
- said peripheral circuit area including a second insulating layer with a BPSG film atop said NSG film, a top surface of said NSG film being at a second level lower than said first level,
- a contact hole in said peripheral circuit area that extends downward from said second level through said NSG and BPSG films into contact with a conductive layer beneath said second insulating layer,
- said contact hole having its interior periphery covered with an aluminum interconnect, said interconnect extending above said contact hole to said first level,
- wherein an aspect ratio of said contact hole is reduced from that if said hole were extended downward from said first level.
4 more elements
Dependencies are inferred from the claim text.