US 5,847,426 AGranted

Contactless flash EPROM using poly silicon isolation

AssigneeNational Semiconductor Corporation

InventorAlbert Bergemont

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Abstract

A contactless flash EPROM cell array with poly 1 isolation blocks and process for its manufacture. The cell array includes poly 1 isolation blocks that are spaced-apart from a pair of drain lines of adjacent cells along a poly 2 word line in a manner that isolates the pair of drain lines from an adjacent pair. The poly 1 isolation blocks are separated from a silicon substrate by an insulating layer and from overlying word lines by an interpoly insulator. The insulating layer also separates floating gates from the substrate. To make the cell array, an insulating-layer/poly 1/interpoly insulator stacked structure is first produced. The stacked structure is masked and patterned to define parallel, spaced-apart poly 1 strips and first and second poly 1 lines that are located between adjacent pairs of the poly 1 strips. Source and drain lines are then formed. Silicon dioxide is grown over the source and drain lines, followed by the formation of poly 2 word lines. Finally, a stacked etch is performed using the word lines as a self-aligned mask to pattern the first and second poly 1 lines to define first and second floating gates and to pattern the poly 1 strips to define poly 1 isolation blocks.

Claims6

Dependent claims

A contactless flash EPROM cell array comprising:

a silicon substrate of a first conductivity type;
a source line of a second conductivity type in the silicon substrate;
first and second drain lines of the second conductivity type on opposite sides of the source line, the first and second drain lines being parallel with, and spaced apart from, the source line to define respective first and second substrate channel regions therebetween;
an insulating layer overlying the silicon substrate, source line, first and second drain lines and first and second substrate channel regions therebetween;
first and second polysilicon (poly 1) isolation blocks spaced apart from the first and second drain lines, respectively, such that first and second drain lines are isolated from an adjacent pair of drain lines in the array, the first and second poly 1 isolation blocks separated from the silicon substrate by the insulating layer;
a first poly 1 floating gate overlying the first substrate channel region and separated therefrom by the insulating layer;
a second poly 1 floating gate overlying the second substrate channel region and separated therefrom by the insulating layer;
a layer of interpoly insulator overlying the first and second floating gates and the first and second poly 1 isolation blocks;
a second polysilicon (poly 2) word line overlying the first and second floating gates and the first and second poly 1 isolation blocks and separated therefrom by the layer of interpoly insulator.

6 more elements

Dependencies are inferred from the claim text.