US 5,846,389 A · Sputtering target protection device

Abstract

A sputtering target protection device for covering and protecting the precisely machined and engineered surface of a sputtering target assembly during shipment, intermediate handling and installation of the target assembly. The protection device includes a top wall preferably having the same general circumferential configuration as the top surface of the target, and an integral skirt which depends from the top wall. The depending skirt is adapted to frictionally engage a side surface of the sputtering target while the top wall of the protection device is spaced from the sputtering surface to cover and protect the surface during shipment and installation of the target assembly. The protection device is designed to be single-use and disposable. Methods are also disclosed.

Claims19

Dependent claims

A device for covering and protecting surfaces of a sputtering target during shipment and installation thereof in a sputtering system, said target having a top surface with a circumferential, a bottom surface and a side surface extending circumferentially thereabout, comprising:

a top wall;
and
an integral skirt depending from said top wall at a juncture to thereby define a target cover for covering at least the top surface of said target, said integral skirt having an inner surface that frictionally engages the circumferential side surface of said target for removable engagement of said target cover with said target during installation thereof in a sputtering system.

Dependencies are inferred from the claim text.

Sputtering target protection device

Life of this patent

Sputtering target protection device

Life of this patent

Abstract

Claims19