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US 5,845,662 AGranted
Device for treatment of wafer-shaped articles, especially silicon wafers
OwnerFranz Sumnitschinventor
Life of this patent
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Abstract
In chamber (1) a basket which is formed by ring (3) and retaining fingers (4) is pivotally mounted. By turning the basket, wafer-shaped article (7) which is held by retaining fingers (4) at an axial distance from ring (3) is caused to rotate. Nozzle (10 and 11) from which a treatment fluid can be applied to article (7) is assigned both to upper and lower large surface (9) of article (7).
Claims32
Device for treatment of wafer-shaped articles having opposite planar surfaces, located in a chamber, with treatment fluid, comprising:
- a rotary mounting attached to said chamber interior for supporting a said wafer-shaped article;
- a first nozzle positioned in proximity to said rotary mounting to permit unobstructed application of said treatment fluid to said wafer-shaped article;
- and
- a second nozzle positioned in proximity to said rotary mounting to permit unobstructed application of said treatment fluid to said wafer-shaped article and positioned generally opposing said first nozzle,
- wherein said first nozzle unobstructedly applies said treatment fluid to a first surface of said wafer-shaped article and said second nozzle unobstructedly applies treatment fluid to a second surface of said wafer-shaped article;
- said rotary mounting comprising a ring pivotally mounted in said chamber to permit rotational displacement in a plane of said wafer-shaped article, and plural retaining fingers operatively attached to said ring, said fingers adjoining an outer periphery of said wafer-shaped article in a plane distant from a plane of said ring.
3 more elements
Device for treatment of wafer-shaped articles, located in a chamber, with treatment fluid, comprising:
- a rotary mounting attached to said chamber interior for supporting a said wafer-shaped article;
- a first nozzle positioned in proximity to said rotary mounting to permit unobstructed application of said treatment fluid to said wafer-shaped article;
- said rotary mounting comprising a ring pivotally mounted in said chamber to permit rotational displacement in a plane of said wafer-shaped article, plural retaining fingers operatively attached to said ring, said fingers adjoining an outer periphery of said wafer-shaped article at a plane distant from a plane of said ring;
- and
- a cover radially surrounding an interior of said ring.
2 more elements
Dependencies are inferred from the claim text.