Method of simulating semiconductor manufacture with process functions according to user application
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsTatsuya Kunikiyo, Katsumi Eikyu, Kenichiro Sonoda, Masato Fujinaga, Kiyoshi Ishikawa, Norihiko Kotani
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Abstract
A method of manufacturing a semiconductor device wherein the device is manufactured according to extracted process parameters. The process parameters are extracted as a set of optimum process parameters which satisfy an intended specification using process functions. The process functions describe a characteristic of the semiconductor device, and are determined using experimental values and/or simulated values. The process parameters may then be transmitted online to a factory.
Claims22
A method of manufacturing a semiconductor device comprising the steps of:
- describing a characteristic of the semiconductor device with process functions of process parameters in a process of manufacturing the semiconductor device, said process functions calibrated using past data or simulation results;
- extracting a set of optimum process parameters satisfying an intended specification using said process functions;
- and
- manufacturing said semiconductor device by the manufacturing process according to said extracted process parameters.
Dependencies are inferred from the claim text.