Coating solution applying method and apparatus
AssigneeDainippon Screen Mfg. Co., Ltd.
InventorMasakazu Sanada
Life of this patent
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Abstract
A method of applying a coating solution to spinning substrates, in which a controller causes a rotary support to spin a substrate at low speed with a predetermined supplying rotational frequency. The coating solution is supplied through a coating solution supply nozzle to a region centrally of the substrate spinning at low speed. The rotational frequency of the substrate is increased to a target rotational frequency before the coating solution supplied to the substrate spreads over an entire surface of the substrate. Then, the controller causes the rotary support to spin the substrate at high speed with a predetermined film-forming rotational frequency, thereby coating the surface of the substrate with a film of desired thickness. Also, an apparatus for performing such method.
Claims25
A method of applying a coating solution to spinning substrates, comprising the steps of:
- (a) operating control means to spin a substrate supported by rotary support means at a predetermined supplying rotational frequency;
- (b) supplying said coating solution through coating solution supply means to a central region of said substrate spinning at said supplying rotational frequency;
- (c) operating said control means to increase the rotational frequency of said substrate to a target rotational frequency higher than said supplying rotational frequency before said coating solution supplied to said substrate spreads over an entire surface of said substrate, in order to apply a force of inertia to rivulets of said coating solution extending radially from periphery of said coating solution;
- and
- (d) operating said control means to spin said substrate supported by said rotary support means at a predetermined film-forming rotational frequency, thereby coating said surface of said substrate with a film of a desired thickness.
A method of applying a coating solution to spinning substrates, comprising the steps of:
- (a) operating a control device to spin a substrate, supported by a rotary support device, with a predetermined supplying rotational frequency;
- (b) supplying said coating solution through coating a solution supply device to a central region of said substrate spinning at said supplying rotational frequency;
- (c) operating said control device to increase the rotational frequency of said substrate to a target rotational frequency higher than said supplying rotational frequency before said coating solution supplied to said substrate spreads over an entire surface of said substrate, in order to apply a force of inertia to rivulets of said coating solution extending radially from periphery of said coating solution;
- and
- (d) operating control device to spin said substrate supported by said rotary support device at a predetermined film-forming rotational frequency, thereby coating said surface of said substrate with a film of desired thickness.
A method of applying a coating solution to spinning substrates, comprising the steps of:
- (a) operating a control device to spin a substrate, supported by a rotary support device, with a predetermined supplying rotational frequency;
- (b) supplying said coating solution through a coating solution supply device to a central region of said substrate spinning at said supplying rotational frequency;
- (c) operating said control device to increase the rotational frequency of said substrate to a target rotational frequency higher than said supplying rotational frequency before said coating solution supplied to said substrate spreads over an entire surface of said substrate, in order to apply a force of inertia to rivulets of said coating solution extending radially from periphery of said coating solution which increases the speed by which the entire surface of the substrate is covered by the coating solution and thereby reduces the quantity of coating solution needed to cover the entire surface to a desired thickness.
Dependencies are inferred from the claim text.