Apparatus for forming a deposited curver coating on a substrate and mirror
AssigneeHoneywell Inc.
InventorsClark Bergman, Thomas M. Crook
Life of this patent
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Abstract
A substrate holder and mask system for depositing curved films and mirrors on flat mirror substrates. A spherical mask is held in close proximity to a substrate by a support structure to intercept a fraction of vapor from a distant source. The film deposited on the substrate behind the mask has a spherically symmetric curvature when the source has a large area. The cross section of the mask support structure is made as small as possible to minimize irregularities in the spherical figure. A mirror is subsequently deposited on said curved substrate after removing said mask.
Claims14
Masking apparatus for forming a deposited curved coating on a substrate, comprising:
- a body having means for supporting the substrate;
- and
- a mask having a spherical shape suspended over the substrate by support means at a predetermined distance from said substrate.
Dependencies are inferred from the claim text.