Crystal holding apparatus
AssigneeShin-Etsu Handotai Co., Ltd.
InventorsMasanori Kimura, Eiichi Iino, Hirotoshi Yamagishi, Kiyotaka Takano
Life of this patent
Estimating the term…
Abstract
In a crystal holding apparatus, a stepped engagement portion of a single crystal formed below a seed crystal is held by holding portions of a pair of lifting jigs so as to be pulled up. A lock mechanism consisting of a hook lever and an engagement pin is provided in order to prevent the closed lifting jigs from opening. Further, a portion of each holding portion to be contacted with a crystal is provided with a swing claw which is swingable about a horizontal pin. Accordingly, it becomes possible to reliably hold the crystal, to prevent generation of a defect in the crystal structure, and to prevent a material melt from being contaminated.
Claims18
A crystal holding apparatus for holding a stepped engagement portion formed between a seed crystal and a straight cylindrical portion of a single crystal during a process of growing the single crystal by rotating and pulling the seed crystal after the seed crystal is brought into contact with a material melt, said crystal holding apparatus comprising:
- a pair of lifting jigs having holding portions that hold the stepped engagement portion;
- a lock mechanism that prevents the holding portions from opening apart;
- and
- an unlock mechanism that can unlock the lock mechanism at an arbitrary selected point of time during the process of growing the single crystal.
A crystal holding apparatus for holding a stepped engagement portion formed between a seed crystal and a straight cylindrical portion of a single crystal during a process of growing the single crystal by rotating and pulling the seed crystal after the seed crystal is brought into contact with a material melt, said crystal holding apparatus comprising:
- a pair of lifting jigs having holding portions that hold the stepped engagement portion;
- means for opening and closing said lifting jigs on respective slide surfaces;
- a stepped portion formed on one of said slide surfaces such that when one of said lifting jigs slides along said stepped portion, the holding portion of said one of said lifting jigs moves vertically relative to the holding portion of the other lifting jig;
- a pin projecting upwardly or downwardly from one of the holding portions;
- and
- a pin hole provided in the other holding portion that receives said pin from an upper or a lower side of said pin when the lifting jigs are closed, the pin being disengageable from the pin hole to open the lifting jigs and release the holding portions from the stepped engagement portion at a selected time during the process of growing the single crystal.
A crystal holding apparatus according to claim 4, wherein each of said holding portions includes a swing claw which is located to contact with the stepped engagement portion of the crystal and which is pivotable about a horizontal axis.
A crystal holding apparatus for holding a stepped engagement portion formed between a seed crystal and a straight cylindrical portion of a single crystal during a process of growing the single crystal by rotating and pulling the seed crystal after the seed crystal is brought into contact with a material melt, the seed crystal holding apparatus comprising
- a pair of lifting jigs each including:
- an upper portion;
- a lower portion;
- a holding portion that holds the stepped engagement portion;
- a driving portion disposed at the upper portion;
- and
- a sliding portion disposed at the upper portion;
- a shield member disposed between, and separating from each other, said driving portions and said sliding and said holding portions;
- and
- a lock mechanism that prevents the holding portions from opening apart.
A crystal holding apparatus for holding a stepped engagement portion formed between a seed crystal and a straight cylindrical portion of a single crystal during a process of growing the single crystal by rotating and pulling the seed crystal after the seed crystal is brought into contact with a material melt, said crystal holding apparatus comprising:
- a pair of lifting jigs having holding portions that hold the stepped engagement portion;
- a lock mechanism that prevents the holding portions from opening apart;
- and
- an unlock mechanism that can unlock the lock mechanism to enable the lifting jigs to pivotally open and release the holding portions from the stepped engagement portion at any selected time during the single crystal growing process.
Dependencies are inferred from the claim text.