Ultra-clean transport carrier
AssigneeInternational Business Machines Corporation
InventorsJeffrey A. Leavey, David S. Feikert
Life of this patent
Estimating the term…
Abstract
A transport carrier for transporting x-ray masks, wafers and the like, from an ultra-clean environment to another through a lesser clean environment. The apparatus includes a box that is sealed from the outside by an access door, one or more fans, at least one air filter, rechargeable batteries or a continuous voltage supply for powering the fans. It also includes a damper mechanism for maintaining a positive air pressure when the access door opens. The damper also secures recirculating air inside the box when the door closes. The recirculating air is continuously cleaned at a rate of 2,000 times/minute. The air filter is placed horizontally, preferably, over a frame facing the product to be transported to ensure a continuous smooth, laminar flow.
Claims32
A transport and storage carrier, comprising:
- a sealable box having an access door, said access door being sealed when said door is in a closed position;
- and
- air circulating means for creating a positive air pressure in said box when said access door is open and for circulating air in said box when said box is in its closed position.
A transport and storage carrier, comprising:
- a sealable box having an access door, said access door being sealed when said door is in a closed position;
- air circulating means for creating a positive air pressure in said box when said access door is open and for circulating air in said box when said box is in its closed position;
- and
- filtering means for filtering said circulating air.
A carrier for the transport and storage from a first clean environment to a second clean environment passing through a less clean environment, the carrier comprising:
- a box having an access door, said door being sealed in a closed position;
- at least one fan inside of said box;
- at least one air filter;
- a power source coupled to said at least one fan;
- characterized in that said at least one air filter is securely held in position over a product to be transported by a frame placed horizontally inside of said box;
- and
- a damper mechanism operating said access door to inhibit outside air from entering the carrier when said access door is opened and maintain an inside air pressure which is independent of the air pressure outside the carrier when said access door is closed.
Dependencies are inferred from the claim text.