Method of growing films by flame synthesis using a stagnation-flow reactor
AssigneeSandia Corporation
InventorsDavid W. Hahn, Christopher F. Edwards
Life of this patent
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Abstract
A method of stabilizing a strained flame in a stagnation flow reactor. By causing a highly strained flame to be divided into a large number of equal size segments it is possible to stablize a highly strained flame that is on the verge of extinction, thereby providing for higher film growth rates. The flame stabilizer is an annular ring mounted coaxially and coplanar with the substrate upon which the film is growing and having a number of vertical pillars mounted on the top surface, thereby increasing the number of azimuthal nodes into which the flame is divided and preserving an axisymmetric structure necessary for stability.
Claims8
A method of growing films by flame synthesis, comprising the steps of:
- a) positioning a flame stabilizer on a top surface of a substrate in a stagnation flow reactor, wherein the flame stabilizer comprises;
- i) an annular ring having a top surface, wherein said annular ring is positioned coaxially and coplanar with the substrate, and
- ii) spaced apart, vertical pillars mounted on the top surface of said annular ring, wherein said vertical pillars are spaced equidistant from one another thereby dividing a flame into equal segments;
- b) injecting a gas through a nozzle in the stagnation flow reactor, wherein the nozzle is spaced apart from and parallel to the substrate and wherein the gas is suitable for forming a film;
- c) igniting the gas to form a flame;
- d) impinging the flame onto the substrate surface;
- and
- d) decreasing the separation distance between the nozzle and the top surface of the substrate to form a strained flame.
Dependencies are inferred from the claim text.