Wafer carrier having both a rigid structure and resistance to corrosive environments
AssigneeMicron Technology, Inc.
InventorsDavid Korn, Keith Smith
Life of this patent
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Abstract
A wafer carrier for use in the transportation and storage of semiconductor wafers. More particularly, the invention is a wafer carrier having both a rigid structure and a corrosion resistant coating. The wafer carrier includes a unitary frame having several wafer supports joined by connecting members. The frame is coated with a material, such as a fluoropolymer, which is resistant to corrosive materials typically used in semiconductor fabrication processes.
Claims12
A carrier for holding and transporting at least one wafer, comprising:
- a unitary frame;
- a corrosion resistant fluoropolymer coating covering said frame;
- and
- corrosion resistant wafer support elements formed entirely from material comprising said corrosion resistant coating and mounted on said frame.
A carrier for holding and transporting at least one wafer, comprising:
- a unitary frame comprising:
- a plurality of spaced elongated wafer support members;
- a first endplate coupling one end of each of said support members;
- a second endplate coupling other ends of said support members;
- a handle attached to said first endplate;
- and
- said frame being constructed from hastalloy, inkalloy, quartz, graphite, or silicone carbide;
- a corrosion resistant coating covering said frame, said coating comprising PFA, PP, HALAR.TM., or ARMORLYNN.TM.;
- and
- corrosion resistant wafer support elements formed entirely from material comprising said corrosion resistant coating and mounted on said support members.
A method of making a carrier for at least one wafer, comprising the steps of:
- providing a unitary frame;
- forming a corrosion resistant coating covering said frame, wherein said coating is selected from a group comprising PFA, PP, HALAR, and ARMORLYNN;
- and
- providing wafer support elements mounted on said frame.
Dependencies are inferred from the claim text.