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US 5,766,367 AGranted
Method for preventing micromechanical structures from adhering to another object
AssigneeSandia Corporation
InventorsJames H. Smith, Antonio J. Ricco
Life of this patent
Estimating the term…
Abstract
A method for preventing micromechanical structures from adhering to another object includes the step of immersing a micromechanical structure and its associated substrate in a chemical species that does not stick to itself. The method can be employed during the manufacture of micromechanical structures to prevent micromechanical parts from sticking or adhering to one another and their associated substrate surface.
Claims21
A method for preventing a micromechanical structure on an associated substrate on which the micromechanical structure was formed from adhering to another object, comprising the steps of:
- immersing in an organic solvent a micromechanical structure and an object that touches said micromechanical structure;
- and
- adding to said solvent a liquid having the property of forming a layer of a surface-attached inert chemical functional group to the surfaces of the micromechanical structure.
Dependencies are inferred from the claim text.