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AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsYo Ichikawa, Hideaki Adachi, Kentaro Setsune, Syunichiro Kawashima
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A surface acoustic module is stable, and its operation frequencies can be varied with high precision. A method of manufacturing the surface acoustic module prevents the module's electrodes from being broken during separation of a sheet of modules into individual components. The surface acoustic module includes electrodes for transmitting and receiving a surface acoustic wave, a surface acoustic wave transmitting substrate, a high resistance thin film, and a thin film for differentiating the transmission velocity of a surface acoustic wave at the high resistance thin film from that at the substrate. The method includes the steps of forming a metallic film on a sheet of the surface acoustic wave transmitting substrate, of forming the electrodes on the metallic film, and of irradiating light or the like to the metallic film so as to increase the film's resistivity.
A surface acoustic wave module comprising electrodes for driving and receiving a surface acoustic wave, a substrate for transmitting said surface acoustic wave, and an oxide thin film comprising one or more group IV-a elements formed on at least one section of a surface of said substrate so as to differentiate a transmission velocity of a surface acoustic wave, wherein the oxide thin film comprising group IV-a group elements is 0.001-0.05.lambda. thick where .lambda. indicates a wavelength of a surface acoustic wave.
A surface acoustic wave module comprising electrodes for driving and receiving a surface acoustic wave, a substrate for transmitting said surface acoustic wave, and a high resistance thin film on at least one section of said substrate, and a thin film formed on said high resistance thin film so as to differentiate the transmission velocity of a surface acoustic wave at the high resistance thin film from the transmission velocity of a surface acoustic wave at said substrate, wherein the high resistance thin film is 1-100 nm thick.
Dependencies are inferred from the claim text.