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US 5,726,217 AGranted
Tetraphenol compounds and process for producing the same
AssigneeSumitomo Chemical Company, Limited
InventorsKoji Ichikawa, Haruyoshi Osaki, Jun Tomioka
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Abstract
A tetraphenol compound represented by the formula (I): ##STR1## wherein R.sup.1, R.sup.2, R.sup.3 and R.sup.4 represent hydrogen 1,2-naphthoquinonediazide-4-sulfonyl or 1,2-naphthoquinonediazide-5-sulfonyl and a method for producing the compound are provided, and the compound can be used as a photosensitizer for a positive resist which exhibits superior properties.
Claims8
A tetraphenol compound represented by the formula (I):
- ##STR9## wherein R.sup.1, R.sup.2, R3 and R.sup.4 represent, independently of one another, hydrogen, 1,2-naphthoquinonediazide-4-sulfonyl or 1,2-naphthoquinonediazide-5-sulfonyl.
A photosensitizer comprising a tetraphenol compound represented by the formula (I):
- ##STR10## wherein one of R.sup.1, R.sup.2, R.sup.3 and R.sup.4 represents 1,2-naphthoquinonediazide-4-sulfonyl or 1,2-naphthoquinonediazide-5-sulfonyl and the remainder represent, independently of one another, hydrogen, 1,2-naphthoquinonediazide-4-sulfonyl or 1,2-naphthoquinonediazide-5-sulfonyl.
Dependencies are inferred from the claim text.