Loading patent…
AssigneeAdvanced Micro Devices, Inc.
InventorVincent Ming Chun Chen
Estimating the term…
A statistical simulation of a semiconductor fabrication process is performed in parallel with the actual process. Input parameters derived from a probability density function are applied to the simulator which, in turn, simulates an actual fabrication process which is modeled as a probability density function. Each simulation step is repeated with a random seed value using a Monte Carlo technique, a trial-and-error method using repeated calculations to determine a best solution to a problem. The simulator generates an output in the form of a probability distribution. The statistical simulation uses single-step feedback in which a simulation run uses input parameters that are supplied or derived from actual in-line measured data. Output data generated by the simulator, both intermediate output structure data and WET data, are matched to actual in-line measured data in circumstances for which measured data is available. The probability density structure of the simulator is adjusted after each simulation step so that simulated data more closely matches in-line measured data.
A manufacturing monitoring system comprising:
A software program encoded on a computer-usable medium having computable readable code embodied therein controlling a manufacturing monitoring system, the manufacturing monitoring system including a fabrication equipment for performing a fabrication process step applied to a workpiece, a test equipment for acquiring a sample of a process test parameter sensed from the workpiece, a computer coupled to the test equipment to receive the process test parameter sample and having a memory, and the software program loadable into the memory and executable on the computer, the software program having a plurality of routines including:
An executable program code encoded on a computer-usable medium having computable readable code embodied therein controlling a manufacturing monitoring system, the manufacturing monitoring system including a fabrication equipment for performing a fabrication process step applied to a workpiece, a test equipment for acquiring a sample of a process test parameter sensed from the workpiece, a computer coupled to the test equipment to receive the process test parameter sample and having a memory, and the software program loadable into the memory and executable on the computer, the software program having a plurality of routines including:
Dependencies are inferred from the claim text.