Scanning probe microscope having a single viewing device for on-axis and oblique angle views
AssigneePark Scientific Instruments
InventorsSang-Il Park, Frederick I. Linker, Ian R. Smith
Life of this patent
Estimating the term…
Abstract
An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
Claims19
A method of operating a scanning probe microscope comprising the steps of:
- (i) providing a first optical device configured to provide an on-axis view of a scanning probe mounted in a scanning probe microscope and a second optical device configured to provide an oblique view of the scanning probe, the first optical device having a first focal plane and the second optical device having a second focal plane;
- (ii) adjusting the focal plane of one of the first optical device and the second optical device to a predetermined distance from the scanning probe;
- and
- (iii) viewing the on-axis or oblique optical view whose focal plane was adjusted through a single viewing device.
A method of operating a scanning probe microscope, said method comprising the steps of:
- (i) providing an on-axis optical view of a scanning probe mounted in a scanning probe microscope and an oblique optical view of the scanning probe;
- (ii) positioning the scanning probe adjacent to a support for holding a sample;
- (iii) moving one of the scanning probe and the support toward the other until the distance between the scanning probe and the support is at a predetermined distance;
- and
- (iv) viewing one of the on-axis and oblique optical views through a single viewing device.
A method of operating a microscope having a scanning probe and an optical device, the method comprising the steps of:
- (i) providing an on-axis optical view through the optical device of a sample to be probed by the scanning probe, wherein the sample is mounted on a sample support of the microscope;
- (ii) moving the optical device relative to the sample to focus the on-axis optical view on a surface of the sample;
- and
- (iii) moving at least one of the scanning probe and the sample support toward the other relative to the focal distance until the distance between the scanning probe and the sample support is equal to a predetermined distance.
A scanning probe microscope having a scanning probe and a support for holding a sample to be probed, the scanning probe microscope comprising:
- (i) means for providing an on-axis optical view of the sample;
- (ii) means for providing an oblique optical view of the sample;
- (iii) means for alternately selecting one of the on-axis and oblique optical views;
- (iv) a viewing device, coupled to the means for providing an on-axis optical view and coupled to the means for providing an oblique optical view, to receive the selected optical view;
- and
- (v) means for adjusting a focal plane of one of the on-axis optical view and the oblique optical view to a predetermined distance from the scanning probe.
A scanning probe microscope having a scanning probe and a support for holding a sample to be probed, the scanning probe microscope comprising:
- (i) means for providing an on-axis optical view of the sample;
- (ii) means for providing an oblique optical view of the sample;
- (iii) means for alternately selecting one of the on-axis and oblique optical views;
- (iv) a viewing device, coupled to the means for providing an on-axis optical view and coupled to the means for providing an oblique optical view, to receive the selected optical view;
- and
- (v) means for moving one of the scanning probe and the support toward the other until the distance between the scanning probe and the support is equal to a predetermined distance.
A scanning probe microscope comprising:
- means for probing a surface of a sample mounted on a support of the scanning probe microscope;
- an optical device to provide an on-axis optical view of the sample;
- means for moving at least one of the optical device and the support toward the other to focus the on-axis optical view on the surface of the sample;
- and
- means for moving at least one of the scanning probe and the sample support toward the other relative to the focal distance until the distance between the scanning probe and the sample support is equal to a predetermined distance.
Dependencies are inferred from the claim text.