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US 5,710,629 AGranted
Interferometric measuring device forming a spacial interference pattern
AssigneeSchneider Electric SA
InventorsAntoine Kevorkian, Isabelle Duport-Schanen, Pierre Benech
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Abstract
Two input beams (10, 20) of the interferometric measuring device, achieved according to the integrated optics technology, are broadened so as to form two spread flat beams creating an interference pattern (30). Two detectors (14, 15) supply two measuring signals, preferably in phase quadrature, representative of two points of the interference plane.
Claims9
A fully integrated interferometric measuring device, comprising:
- a rigid block including first and second waveguides which form respective first and second optical transmission channels for mutually coherent input signals, said rigid block including broadening means for generating first and second spread flat beams respectively in the first and second channels such that each spread flat beam has substantially flat wavefronts, the wavefronts of the first and second beams intersecting each other along an axis of symmetry and forming a preset angle therebetween, the wavefronts creating a spatial interference pattern comprising fringes along an interference zone which extends perpendicular to the axis of symmetry, said broadening means comprising at least one broadening device provided in the first and second optical transmission channels;
- and
- analyzing means for analyzing said interference fringes, the analyzing means comprising detectors disposed in the interference zone along an output face of the rigid block.
Dependencies are inferred from the claim text.