Method of orientation treatment of orientation film and apparatus of orientation treatment of orientation film
AssigneeNissin Electric Co., Ltd.
InventorsMasahiro Nakabayashi, Norio Asagi, Hajime Kuwahara, Taizou Ehara
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Abstract
In a method and an apparatus of orientation treatment of an orientation film according to the present invention, the surface of a orientation film formed on a substrate for orientating liquid-crystal molecules is rubbed in a predetermined direction. Thereafter ion beams are radiated onto the orientation film in a vacuum in a direction different from the rubbing direction, that is, in the direction obliquely above the orientation film surface. In the method, these steps can be reversed.
Claims6
A method of orientation treatment of an orientation film of a high molecular weight organic material formed on a substrate for orientating liquid-crystal molecules, comprising the steps of:
- rubbing a surface of said orientation film;
- and
- radiating ion beams onto the rubbed surface of said orientation film in a vacuum from a direction substantially perpendicular to the surface of said orientation film.
A method of orientation treatment of an orientation film of a high molecular weight organic material formed on a substrate for orientating liquid-crystal molecules, comprising the steps of:
- radiating ion beams onto said orientation film in a vacuum from a direction substantially perpendicular to the surface of said orientation film;
- and
- rubbing a surface of the irradiated orientation film.
An apparatus for orientation treatment of a high molecular weight organic material orientation film formed on a substrate for orientating liquid-crystal molecules, comprising in combination:
- rubbing means for rubbing a surface of said orientation film;
- and
- radiating means for radiating ion beams onto said orientation film in a vacuum
- wherein said rubbing means rubs the surface of said orientation film in a predetermined direction, and said radiating means radiates said ion beams onto said orientation film from a direction different from the direction of the rubbing by said rubbing means and from a direction substantially perpendicular to the surface of said orientation film.
Dependencies are inferred from the claim text.