Actuated mirror array for use in optical projection system
AssigneeDaewoo Electronics Co., Ltd.
InventorsYong-Bae Jeon, Young-Jun Choi
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AssigneeDaewoo Electronics Co., Ltd.
InventorsYong-Bae Jeon, Young-Jun Choi
Estimating the term…
An M.times.N actuated mirror array for use in an optical projection system, comprises: a substrate having an array of M.times.N openings therethrough and an array of connecting terminals, wherein each of the M.times.N openings is filled with a metallization and each of the connecting terminals is located on top of each of the M.times.N openings filled with the metallization; an array of M.times.N actuators, wherein each of the M.times.N actuators is provided with a top surface, a bottom surface and a pair of external sides, and is comprised of a pair of electrodisplacive members, a common signal electrode located between the pair of electrodisplacive members, and a pair of reference electrodes on the pair of external sides of the actuator, respectively; and an array of M.times.N mirrors, wherein each of the M.times.N mirrors is coupled with each of the M.times.N actuators and is located on the top surface thereof.
An M.times.N actuated mirror array, wherein M and N are integers, comprising:
Dependencies are inferred from the claim text.