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AssigneeMitsubishi Denki Kabushiki Kaisha
InventorTohru Koyama
Estimating the term…
A sample to be measured having a semiconductor integrated circuit having interconnection lines is set on a scanning photoinduced current analyzer with one end of the interconnection line connected to a ground and the other end connected through a current amplifier to the ground. When a laser beam falls on part having a comparatively low thermal conductivity, such as a part having a void, of the interconnection line while the interconnection line is scanned with the laser beam, temperature distribution in the interconnection line changes at the part. The change in temperature distribution produces spontaneous thermoelectromotive force by the Seebeck effect to induce a current. The current amplifier amplifies the induced current, and then an image date converter converts the amplified current into image information in synchronism with the scanning operation of the laser beam. Since the photoinduced current can be measured without supplying a bias current to the sample to be measured, a current image corresponding to the photoinduced current can be formed to determine the position of a void even if the sample to be measured has a high resistance.
A scanning photoinduced current analyzer capable of detecting photoinduced current induced in a sample to be measured when the sample to be measured is scanned with a focused laser beam, said sample to be measured having opposing contact ends and a resistance of 10 k.OMEGA. or greater, said scanning photoinduced current analyzer comprising:
A scanning photoinduced current analyzer for providing a current image of a sample to be measured scanned with a focused laser beam, comprising:
Dependencies are inferred from the claim text.