Multiple axes drive apparatus with electrostatic drive means

A multiple axes drive apparatus having a plurality of electrostatic actuators for applying driving forces in a plurality of different coplanar directions to a driven member, said plurality of electrostatic actuators being stacked and operably interconnected, each electrostatic actuator of said drive apparatus comprising:

• a first member comprising a plurality of parallel spaced apart first sheets;
• a second member comprising a plurality of parallel spaced apart second sheets disposed interleaved between said first sheets, the spacing and mounting of said first and second sheets being such as to permit said first and second members to move relative to each other in a predetermined direction;
• said first sheets each having a plurality of first parallel electrode strips disposed at a predetermined inter-strip pitch oriented perpendicular to said predetermined direction, said second sheets each having a plurality of second parallel electrode strips disposed at said predetermined inter-strip pitch oriented perpendicular to said predetermined direction, said first and second members being relatively movable in said predetermined direction in response to a Coulomb force generated between said first and second electrode strips when voltage is applied to said first and second electrode strips.