Semiconductor acceleration sensor

A semiconductor acceleration sensor comprising:

• a semiconductor body including:
• a peripheral frame;
• a central weight disposed within the peripheral frame;
• and
• first and second diametrically opposite beams extending from and connecting the peripheral frame and the weight, the first and second beams being thinner than the peripheral frame and the weight, the peripheral frame, the first and second beams, and the weight having respective front surfaces that are all coplanar;
• first, second, third, and fourth piezoresistors disposed on the front surface of the first beams;
• and
• fifth, sixth, seventh, and eighth piezoresistors disposed on the front surface of the second beam wherein the first, second, third, fourth, fifth, sixth, seventh, and eighth piezoresistors are all parallel to each other and the first, second, fifth, and sixth piezoresistors are electrically connected in a first bridge circuit and the third, fourth, seventh, and eighth piezoresistors are electrically connected in a second bridge circuit whereby accelerations applied to the semiconductor body parallel to the front surface of the weight and perpendicular to the front surface of the weight can be individually detected through the first and second bridge circuits, respectively.