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AssigneesHitachi, Ltd., Hitachi Car Engineering Co., Ltd.
InventorsMasamichi Yamada, Kaoru Uchiyama, Izumi Watanabe, Tadashi Isono, Toshihiko Nakau
Estimating the term…
A measuring element for a mass air flow sensor formed on a substrate for measuring a flow rate of an objective fluid comprises a pair of heated resistors of thin films juxtaposed in the flowing direction of the objective fluid, formed at a thin film heated resistor forming part on the substrate, a pair of non-heated ambient temperature sensing resistors of thin films, formed at a thin film ambient temperature sensing resistor forming part on the substrate, and a plurality of electrode terminals of thin films formed at a supporting part at which the substrate is supported, being a part excluding the heated resistor thin film forming part and the thin film ambient temperature sensing resistor forming part, for taking out electrical signals from the heated resisters and the non-heated ambient temperature sensing resistors, wherein the thin film heated resistor forming part and the thin film ambient temperature sensing resistor forming part are shifted each other and arranged before and after in the flowing direction of the fluid, and shifted and arranged left and right in the direction perpendicular to the flowing direction so that the pair of the heated resistors and the pair of the non-heated do not superimpose each other in the viewing direction parallel to the flowing direction, and the supporting part is allocated at one end side of the substrate, at which the plurality of electrode terminals of thin films are formed.
A measuring element for a mass air flow sensor formed on a substrate, comprising:
Dependencies are inferred from the claim text.