Test gas leak detector
AssigneeLeybold Aktiengesellschaft
InventorsThomas Bohm, Ulrich Dobler
Life of this patent
Estimating the term…
Abstract
A leak detector (1) suitable for detecting leakage with a test gas connection (2), a test gas detector (3), a gas pump (4) and a test gas line (5) extending between the test gas connection (2) and the gas pump (4) and connected to the inlet (6) of the test gas detector (3) via a blockable branch; in order to shorten the response time, it is proposed that the line (7, 8) connecting the test gas line (5) to the inlet region (6) of the test gas detector be such that, during measurement, all of the gas flowing in the test gas line (5) essentially enters the inlet region (6) of the test gas detector (3).
Claims6
Leak detecting apparatus, comprising:
- a test gas connection;
- a test gas detector, said test gas detector including a mass spectrometer connected to a high vacuum turbomolecular pump through which a test gas flows upstream, so that a discharge of said high vacuum turbomolecular pump forms an inlet to said test gas detector;
- a gas pump;
- a test gas line extending between the test gas connection and the gas pump;
- and
- blockable means connecting said test gas connection, said gas pump, and said inlet of said gas detector such that in a measurement mode said test gas connection and said gas pump are fluidly connected via said inlet, in a pumping mode said inlet is fluidly disconnected from both said test gas connection and said gas pump while said test gas connection and said gas pump are fluidly connected, and in a standby mode said test gas connection is fluidly disconnected from said inlet and said gas pump while said inlet and said gas pump are fluidly connected.
Leak detecting apparatus, comprising:
- a test gas connection;
- a test gas detector, said test gas detector including a mass spectrometer connected to a high vacuum turbomolecular pump through which a test gas flows upstream, so that a discharge of said high vacuum turbomolecular pump forms an inlet to said test gas detector;
- a gas pump;
- a test gas line extending between the test gas connection and the gas pump;
- blockable means connecting said test gas connection, said gas pump, and said inlet of said gas detector such that in a measurement mode said test gas connection and said gas pump are fluidly connected via said inlet, in a pumping mode said inlet is fluidly disconnected from both said test gas connection and said gas pump while said test gas connection and said gas pump are fluidly connected, and in a standby mode said test gas connection is fluidly disconnected from said inlet and said gas pump while said inlet and said gas pump are fluidly connected;
- and
- said blockable means including a pair of branch lines connected between said test gas line and said inlet of the gas detector, said test gas line having an intermediate section extending between said two branch lines, wherein the two branch lines each have a different cross sectional area at the inlet to the gas detector and the branch lines are mounted concentrically, one inside the other at the inlet to the gas detector.
Dependencies are inferred from the claim text.