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AssigneeInternational Business Machines Corporation
InventorsRaschid Jose Bezama, John Ulrich Knickerbocker, Govindarajan Natarajan, Joseph Gang Zhou
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The present invention relates generally to a new apparatus and method for simultaneously laminating a plurality of substrates having at least one cavity. More particularly, the invention encompasses apparatus and method for fabricating cavities in MLC (multi-layer ceramic). A membrane with or without an opening is placed on the top surface of the unlaminated green sheet having at least one cavity and then standard pressure is applied to laminate the green sheets, while simultaneously a counter pressure is applied in the cavity to prevent the cavity from deforming or collapsing. This is done to simultaneously form a plurality of cavity substrates.
An apparatus for forming cavities in at least one ceramic layer comprising, a first plate to accommodate said at least one ceramic layer having at least one cavity, at least one cavity forming membrane over at least a portion of said at least one cavity in said at least one ceramic layer, at least one internal pressure means over said at least one membrane, a first porous plate having fluid passage means adjacent at least a portion of said at least one internal pressure means, and at least one external pressure application means adjacent said first porous plate, whereupon the application of said external pressure, said internal pressure means in cooperation with said at least one membrane counters said external pressure, and thereby forms said at least one ceramic layer having at least on cavity.
An apparatus for forming cavities in at least one ceramic layer comprising, a first plate to accommodate said at least one ceramic layer having at least one cavity, at least one cavity forming membrane having at least one opening over at least a portion of said at least one cavity in said at least one ceramic layer, such that at least a portion of said at least one opening is over at least a portion of said cavity, at least one internal pressure means over said at least one membrane, a first porous plate having fluid passage means adjacent said internal pressure means and at least a portion of said at least one membrane, such that at least a portion of said at least one opening is over at least a portion of said opening in said membrane, and at least one external pressure application means adjacent said first porous plate, whereupon the application of said at least one external pressure said internal pressure means in cooperation with said at least one membrane counters said external pressure and thereby forms said at least one ceramic layer having at least on cavity.
Dependencies are inferred from the claim text.